M00100 - SEMI M1 - Specification for Polished Single Crystal Silicon Wafers Revision:SEMI M1-0416 - Superseded To standardize the classification of

To standardize the classification of color breakup for flat panel displays is necessary

SEMI MF1230-02 (first SEMI publication)

The key options used in the calculation are specified to define the data reported

3  This Specification does not require that the metadata provided by the equipment be directly human readable

SEMI D22-0818 (Reapproved 0924)

M00100 - SEMI M1 - Specification for Polished Single Crystal Silicon Wafers Revision:SEMI M1-0416 - Superseded To standardize the classification of1 Purpose 1. 1 Single crystal silicon wafers are utilized for essentially all integrated circuits and many other semiconductor devices. To permit common processing equipment to be used in multiple device fabrication lines, it is essential for the wafer dimensions to be standardized. 1. 2 In addition, as technology advances to smaller and smaller dimensions for the elements of high density integrated circuits, it has become of interest to standardize