G00600 - SEMI G6 - Test Method for Seal Ring Flatness Revision:SEMI G6-89 - Inactive 本スタンダードは，global Micropatterning Committeeで技術的に承認されている。現版はglobal Audits and

本スタンダードは，global Micropatterning Committeeで技術的に承認されている。現版はglobal Audits and Reviews Subcommitteeで2006年5月16日に発行が承認された。2006年6月にwww

Applicable display sizes are from Type

Suitable analytical procedures are defined in each standard for each grade of liquid chemical such that their sensitivity meets the requirements of each of the respective grades of liquid chemicals

This Standard was technically approved by the global Facilities Technical Committee

ambient atmosphere

G00600 - SEMI G6 - Test Method for Seal Ring Flatness Revision:SEMI G6-89 - Inactive 本スタンダードは，global Micropatterning Committeeで技術的に承認されている。現版はglobal Audits andNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification covers the method for determining the maximum deviation between the seal ring and a reference plane defined by three fixed points on the seal ring. This method will not work on parts smaller than 0. 330